| The use of atomic layer deposition in advanced nanopatterning AJM Mackus, AA Bol, WMM Kessels Nanoscale 6 (19), 10941-10960, 2014 | 435 | 2014 |
| From the bottom-up: toward area-selective atomic layer deposition with high selectivity AJM Mackus, MJM Merkx, WMM Kessels Chemistry of Materials 31 (1), 2-12, 2018 | 398 | 2018 |
| Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review AJM Mackus, JR Schneider, C MacIsaac, JG Baker, SF Bent Chemistry of Materials 31 (4), 1142-1183, 2018 | 252 | 2018 |
| Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle A Mameli, MJM Merkx, B Karasulu, F Roozeboom, WEMM Kessels, ... ACS nano 11 (9), 9303-9311, 2017 | 205 | 2017 |
| Supported core/shell bimetallic nanoparticles synthesis by atomic layer deposition MJ Weber, AJM Mackus, MA Verheijen, C van der Marel, WMM Kessels Chemistry of Materials 24 (15), 2973-2977, 2012 | 185 | 2012 |
| Remote plasma ALD of platinum and platinum oxide films HCM Knoops, AJM Mackus, ME Donders, MCM Van De Sanden, ... Electrochemical and Solid-State Letters 12 (7), G34, 2009 | 166 | 2009 |
| Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy WMM Kessels, HCM Knoops, SAF Dielissen, AJM Mackus, ... Applied Physics Letters 95 (1), 2009 | 158 | 2009 |
| Influence of oxygen exposure on the nucleation of platinum atomic layer deposition: consequences for film growth, nanopatterning, and nanoparticle synthesis AJM Mackus, MA Verheijen, N Leick, AA Bol, WMM Kessels Chemistry of Materials 25 (9), 1905-1911, 2013 | 154 | 2013 |
| Catalytic combustion and dehydrogenation reactions during atomic layer deposition of platinum AJM Mackus, N Leick, L Baker, WMM Kessels Chemistry of Materials 24 (10), 1752-1761, 2012 | 145 | 2012 |
| Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma L Baker, AS Cavanagh, D Seghete, SM George, AJM Mackus, ... Journal of Applied Physics 109 (8), 2011 | 130 | 2011 |
| Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition E Langereis, HCM Knoops, AJM Mackus, F Roozeboom, ... Journal of Applied Physics 102 (8), 2007 | 105 | 2007 |
| Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition AJM Mackus, JJL Mulders, MCM Van De Sanden, WMM Kessels Journal of Applied Physics 107 (11), 2010 | 98 | 2010 |
| Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes AJM Mackus, SBS Heil, E Langereis, HCM Knoops, MCM Van de Sanden, ... Journal of Vacuum Science & Technology A 28 (1), 77-87, 2010 | 95 | 2010 |
| Area-selective atomic layer deposition of ZnO by area activation using electron beam-induced deposition A Mameli, B Karasulu, MA Verheijen, B Barcones, B Macco, AJM Mackus, ... Chemistry of Materials 31 (4), 1250-1257, 2019 | 90 | 2019 |
| Room-temperature atomic layer deposition of platinum AJM Mackus, D Garcia-Alonso, HCM Knoops, AA Bol, WMM Kessels Chemistry of Materials 25 (9), 1769-1774, 2013 | 89 | 2013 |
| Nanopatterning by direct-write atomic layer deposition AJM Mackus, SAF Dielissen, JJL Mulders, WMM Kessels Nanoscale 4 (15), 4477-4480, 2012 | 85 | 2012 |
| Area-Selective Atomic Layer Deposition of In2O3:H Using a μ-Plasma Printer for Local Area Activation A Mameli, Y Kuang, M Aghaee, CK Ande, B Karasulu, M Creatore, ... Chemistry of Materials 29 (3), 921-925, 2017 | 82 | 2017 |
| Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas MJ Weber, AJM Mackus, MA Verheijen, V Longo, AA Bol, WMM Kessels The Journal of Physical Chemistry C 118 (16), 8702-8711, 2014 | 80 | 2014 |
| Direct-write atomic layer deposition of high-quality Pt nanostructures: selective growth conditions and seed layer requirements AJM Mackus, NFW Thissen, JJL Mulders, PHF Trompenaars, ... The Journal of Physical Chemistry C 117 (20), 10788-10798, 2013 | 74 | 2013 |
| The vibrations of circular plates and their relation to Bessel functions JR Airey Proceedings of the Physical Society of London 23 (1), 225, 1910 | 70 | 1910 |
