Takip et
Fred Roozeboom
Fred Roozeboom
Diğer adlarFreddy Roozeboom, F. Roozeboom
utwente.nl üzerinde doğrulanmış e-posta adresine sahip
Başlık
Alıntı yapanlar
Alıntı yapanlar
Yıl
Vanadium oxide monolayer catalysts. 3. A Raman spectroscopic and temperature-programmed reduction study of monolayer and crystal-type vanadia on various supports
F Roozeboom, MC Mittelmeijer-Hazeleger, JA Moulijn, J Medema, ...
The Journal of Physical Chemistry 84 (21), 2783-2791, 1980
4861980
Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition
P Poodt, DC Cameron, E Dickey, SM George, V Kuznetsov, GN Parsons, ...
Journal of Vacuum Science & Technology A 30 (1), 2012
4482012
3‐D integrated all‐solid‐state rechargeable batteries
PHL Notten, F Roozeboom, RAH Niessen, L Baggetto
Advanced Materials 19 (24), 4564-4567, 2007
4442007
Energetics of self-interstitial clusters in Si
NEB Cowern, G Mannino, PA Stolk, F Roozeboom, HGA Huizing, ...
Physical Review Letters 82 (22), 4460, 1999
4141999
High energy density all‐solid‐state batteries: a challenging concept towards 3D integration
L Baggetto, RAH Niessen, F Roozeboom, PHL Notten
Advanced Functional Materials 18 (7), 1057-1066, 2008
4062008
High-speed spatial atomic-layer deposition of aluminum oxide layers for solar cell passivation
P Poodt, A Lankhorst, F Roozeboom, K Spee, D Maas, A Vermeer
Adv. Mater 22 (32), 3564-3567, 2010
4022010
Plasma and thermal ALD of Al2O3 in a commercial 200 mm ALD reactor
JL Van Hemmen, SBS Heil, JH Klootwijk, F Roozeboom, CJ Hodson, ...
Journal of The Electrochemical Society 154 (7), G165, 2007
3592007
Rapid thermal processing: science and technology
RB Fair
Academic Press, 2012
2022012
Deposition of TiN and HfO2 in a commercial 200mm remote plasma atomic layer deposition reactor
SBS Heil, JL Van Hemmen, CJ Hodson, N Singh, JH Klootwijk, ...
Journal of Vacuum Science & Technology A 25 (5), 1357-1366, 2007
2002007
Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
A Mameli, MJM Merkx, B Karasulu, F Roozeboom, WEMM Kessels, ...
ACS nano 11 (9), 9303-9311, 2017
1952017
Ultrahigh capacitance density for multiple ALD-grown MIM capacitor stacks in 3-D silicon
JH Klootwijk, KB Jinesh, W Dekkers, JF Verhoeven, FC Van Den Heuvel, ...
IEEE Electron Device Letters 29 (7), 740-742, 2008
1832008
Atomic layer etching: What can we learn from atomic layer deposition?
T Faraz, F Roozeboom, HCM Knoops, WMM Kessels
ECS Journal of Solid State Science and Technology 4 (6), N5023, 2015
1632015
Rapid thermal processing systems: A review with emphasis on temperature control
F Roozeboom, N Parekh
Journal of Vacuum Science & Technology B: Microelectronics Processing and …, 1990
1581990
Vanadium oxide monolayer catalysts. I. Preparation, characterization, and thermal stability
F Roozeboom, T Fransen, P Mars, PJ Gellings
Zeitschrift für anorganische und allgemeine Chemie 449 (1), 25-40, 1979
1501979
Vanadium oxide monolayer catalysts: the vapor-phase oxidation of methanol
F Roozeboom, PD Cordingley, PJ Gellings
Journal of Catalysis 68 (2), 464-472, 1981
1481981
Low-temperature deposition of TiN by plasma-assisted atomic layer deposition
SBS Heil, E Langereis, F Roozeboom, MCM Van De Sanden, ...
Journal of the Electrochemical Society 153 (11), G956, 2006
1442006
Ferromagnetic resonance and eddy currents in high-permeable thin films
E Van de Riet, F Roozeboom
Journal of applied physics 81 (1), 350-354, 1997
1361997
Spatial atomic layer deposition of zinc oxide thin films
A Illiberi, F Roozeboom, P Poodt
ACS applied materials & interfaces 4 (1), 268-272, 2012
1282012
Deposition of TiN and TaN by remote plasma ALD for Cu and Li diffusion barrier applications
HCM Knoops, L Baggetto, E Langereis, MCM Van De Sanden, ...
Journal of the Electrochemical Society 155 (12), G287, 2008
1242008
Thermally assisted reversal of exchange biasing in NiO and FeMn based systems
PAA Van der Heijden, T Maas, WJM De Jonge, JCS Kools, F Roozeboom, ...
Applied physics letters 72 (4), 492-494, 1998
1231998
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