High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps S Pourkamali, A Hashimura, R Abdolvand, GK Ho, A Erbil, F Ayazi
Journal of Microelectromechanical Systems 12 (4), 487-496, 2003
244 2003 VHF single crystal silicon capacitive elliptic bulk-mode disk resonators-part II: implementation and characterization S Pourkamali, Z Hao, F Ayazi
Journal of Microelectromechanical Systems 13 (6), 1054-1062, 2004
162 2004 Electronically temperature compensated silicon bulk acoustic resonator reference oscillators K Sundaresan, GK Ho, S Pourkamali, F Ayazi
IEEE Journal of Solid-State Circuits 42 (6), 1425-1434, 2007
148 2007 Electrically coupled MEMS bandpass filters: Part I: With coupling element S Pourkamali, F Ayazi
Sensors and Actuators A: Physical 122 (2), 307-316, 2005
142 2005 VHF single-crystal silicon elliptic bulk-mode capacitive disk resonators-part I: design and modeling Z Hao, S Pourkamali, F Ayazi
Journal of Microelectromechanical Systems 13 (6), 1043-1053, 2004
134 2004 High-frequency thermally actuated electromechanical resonators with piezoresistive readout A Rahafrooz, S Pourkamali
IEEE Transactions on Electron Devices 58 (4), 1205-1214, 2011
128 2011 Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators—Part I: Concept and fabrication S Pourkamali, GK Ho, F Ayazi
IEEE Transactions on Electron Devices 54 (8), 2017-2023, 2007
124 2007 Methods of forming oxide masks with submicron openings and microstructures formed thereby F Ayazi, R Abdolvand, SP Anaraki
US Patent 7,056,757, 2006
103 2006 Individual air-borne particle mass measurement using high-frequency micromechanical resonators A Hajjam, JC Wilson, S Pourkamali
IEEE Sensors Journal 11 (11), 2883-2890, 2011
92 2011 A finite element analysis of thermoelastic damping in vented MEMS beam resonators X Guo, YB Yi, S Pourkamali
International Journal of Mechanical Sciences 74, 73-82, 2013
83 2013 Capacitive resonators and methods of fabrication F Ayazi, SP Anaraki
US Patent 7,023,065, 2006
81 2006 Temperature compensated IBAR reference oscillators GKK Ho, K Sundaresan, S Pourkamali, F Ayazi
19th IEEE International Conference on Micro Electro Mechanical Systems, 910-913, 2006
80 2006 Low-impedance VHF and UHF capacitive silicon bulk acoustic-wave resonators—Part II: Measurement and characterization S Pourkamali, GK Ho, F Ayazi
IEEE Transactions on Electron Devices 54 (8), 2024-2030, 2007
79 2007 Vertical capacitive sibars S Pourkamali, GK Ho, F Ayazi
18th IEEE International Conference on Micro Electro Mechanical Systems, 2005 …, 2005
78 2005 SOI-based HF and VHF single-crystal silicon resonators with sub-100 nanometer vertical capacitive gaps S Pourkamali, F Ayazi
TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003
77 2003 A low phase noise 100MHz silicon BAW reference oscillator K Sundaresan, GK Ho, S Pourkamali, F Ayazi
IEEE Custom Integrated Circuits Conference 2006, 841-844, 2006
65 2006 Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: II. Device fabrication and characterization A Hajjam, JC Wilson, A Rahafrooz, S Pourkamali
Journal of Micromechanics and Microengineering 20 (12), 125019, 2010
59 2010 Micromechanical IBARs: Tunable High- Resonators for Temperature-Compensated Reference Oscillators GK Ho, K Sundaresan, S Pourkamali, F Ayazi
Journal of Microelectromechanical Systems 19 (3), 503-515, 2010
59 2010 Low-motional-impedance highly-tunable I/sup 2/resonators for temperature-compensated reference oscillators GK Ho, K Sundaresan, S Pourkamali, F Ayazi
18th IEEE International Conference on Micro Electro Mechanical Systems, 2005 …, 2005
59 2005 Thermal actuation, a suitable mechanism for high frequency electromechanical resonators A Rahafrooz, A Hajjam, B Tousifar, S Pourkamali
2010 IEEE 23rd international conference on micro electro mechanical systems …, 2010
58 2010