Takip et
Yuri Barsukov
Yuri Barsukov
Princeton Plasma Physics Lab
pppl.gov üzerinde doğrulanmış e-posta adresine sahip - Ana Sayfa
Başlık
Alıntı yapanlar
Alıntı yapanlar
Yıl
Highly selective Si3N4/SiO2 etching using an NF3/N2/O2/H2 remote plasma. I. Plasma source and critical fluxes
V Volynets, Y Barsukov, G Kim, JE Jung, SK Nam, K Han, S Huang, ...
Journal of Vacuum Science & Technology A 38 (2), 2020
282020
Role of NO in highly selective SiN/SiO2 and SiN/Si etching with NF3/O2 remote plasma: Experiment and simulation
Y Barsukov, V Volynets, S Lee, G Kim, B Lee, SK Nam, K Han
Journal of Vacuum Science & Technology A 35 (6), 2017
202017
Highly selective Si3N4/SiO2 etching using an NF3/N2/O2/H2 remote plasma. II. Surface reaction mechanism
JE Jung, Y Barsukov, V Volynets, G Kim, SK Nam, K Han, S Huang, ...
Journal of Vacuum Science & Technology A 38 (2), 2020
182020
Boron trichloride plasma treatment effect on ohmic contact resistance formed on GaN-based epitaxial structure
AA Kobelev, YV Barsukov, NA Andrianov, AS Smirnov
Journal of Physics: Conference Series 586 (1), 012013, 2015
152015
Enhanced silicon nitride etching in the presence of F atoms: Quantum chemistry simulation
YV Barsukov, V Volynets, AA Kobelev, NA Andrianov, AV Tulub, ...
Journal of Vacuum Science & Technology A 36 (6), 2018
132018
Influence of surface processing in a BCl3 plasma on the formation of ohmic contacts to AlGaN/GaN structures
NA Andrianov, AA Kobelev, AS Smirnov, YV Barsukov, YM Zhukov
Technical Physics 62, 436-440, 2017
72017
Boron Trichloride Dry Etching
A Kobelev, N Andrianov, Y Barsukov, A Smirnov
Encyclopedia of Plasma Technology, 2016
72016
Boron adatom adsorption on graphene: A case study in computational chemistry methods for surface interactions
S Jubin, A Rau, Y Barsukov, S Ethier, I Kaganovich
Frontiers in Physics 10, 908694, 2022
62022
Comparison of zinc and magnesium clusters in their reaction with organochlorides: Toward a molecular picture of grignard reagent formation
YV Barsukov, VV Porsev, AV Tulub
International Journal of Quantum Chemistry 112 (18), 3002-3007, 2012
62012
Collisional RF sheath in capacitive discharge in strong oblique magnetic field
A Kobelev, N Babinov, Y Barsukov, T Chernoizumskaya, A Dmitriev, ...
Physics of Plasmas 26 (1), 2019
52019
Systematic quantum chemical research of the reaction of magnesium clusters with organic halides
VV Porsev, YV Barsukov, AV Tulub
Computational and Theoretical Chemistry 995, 55-65, 2012
52012
Boron nitride nanotube precursor formation during high-temperature synthesis: Kinetic and thermodynamic modelling
Y Barsukov, O Dwivedi, I Kaganovich, S Jubin, A Khrabry, S Ethier
arXiv preprint arXiv:2105.05934, 2021
42021
Etching of Si3N4 by SF6/H2 and SF6/D2 plasmas
PA Pankratiev, YV Barsukov, AA Kobelev, AY Vinogradov, IV Miroshnikov, ...
Journal of Physics: Conference Series 1697 (1), 012222, 2020
42020
Integrated modeling of carbon and boron nitride nanotubes synthesis in plasma of high-pressure arc
I Kaganovich, J Chen, A Khrabry, A Khodak, Y Barsukov, O Dwiwedi, ...
APS Annual Gaseous Electronics Meeting Abstracts, XF4. 007, 2020
32020
Compact and accurate chemical mechanism for methane pyrolysis with PAH growth
A Khrabry, ID Kaganovich, Y Barsukov, S Raman, E Turkoz, D Graves
International Journal of Hydrogen Energy 56, 1340-1360, 2024
12024
Orientation-dependent etching of silicon by fluorine molecules: A quantum chemistry computational study
OD Dwivedi, Y Barsukov, S Jubin, JR Vella, I Kaganovich
Journal of Vacuum Science & Technology A 41 (5), 2023
12023
Selective SiN/SiO2 etching by SF6/H2/Ar/He plasma
P Pankratiev, Y Barsukov, A Vinogradov, V Volynets, A Kobelev, ...
AIP Conference Proceedings 2179 (1), 2019
12019
Etching method using remote plasma source, and method of fabricating semiconductor device including the etching method
KIM Gon-Jun, Y Barsukov, V Volynets, D Liu, S An, B Yoo, SH Lee, ...
US Patent 10,418,250, 2019
12019
Plasma processes affecting etching and growth of nitride materials
Y Barsukov
arXiv preprint arXiv:2306.04789, 2023
2023
Integrated modeling of methane pyrolysis and carbon nanotube synthesis by the thermal plasma
A Khrabry, I Kaganovich, Y Barsukov, L Hoffenberg, D Graves
APS Annual Gaseous Electronics Meeting Abstracts, IT4. 075, 2023
2023
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