An improved lumped element nonlinear circuit model for a circular CMUT cell H Koymen, A Atalar, E Aydogdu, C Kocabas, HK Oguz, S Olcum, ... IEEE transactions on ultrasonics, ferroelectrics, and frequency control 59 …, 2012 | 112 | 2012 |
RF Channel-Select Micromechanical Disk Filters—Part I: Design A Ozgurluk, M Akgul, CTC Nguyen IEEE transactions on ultrasonics, ferroelectrics, and frequency control …, 2019 | 30 | 2019 |
Parametric nonlinear lumped element model for circular CMUTs in collapsed mode E Aydogdu, A Ozgurluk, A Atalar, H Köymen IEEE transactions on ultrasonics, ferroelectrics, and frequency control 61 …, 2014 | 24 | 2014 |
RF Channel-Select Micromechanical Disk Filters—Part II: Demonstration M Akgul, A Ozgurluk, CTC Nguyen IEEE transactions on ultrasonics, ferroelectrics, and frequency control …, 2019 | 16* | 2019 |
Single-digit-nanometer capacitive-gap transduced micromechanical disk resonators A Ozgurluk, K Peleaux, CTC Nguyen 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems …, 2020 | 13 | 2020 |
Radiation impedance of collapsed capacitive micromachined ultrasonic transducers A Ozgurluk, A Atalar, H Koymen, S Olcum IEEE transactions on ultrasonics, ferroelectrics, and frequency control 59 …, 2012 | 12 | 2012 |
Radiation impedance of an array of circular capacitive micromachined ultrasonic transducers in collapsed state A Ozgurluk, A Atalar, H Koymen, S Olcum 2011 IEEE International Ultrasonics Symposium, 1020-1023, 2011 | 10 | 2011 |
Nonlinear equivalent circuit model for circular CMUTs in uncollapsed and collapsed mode E Aydogdu, A Ozgurluk, HK Oguz, A Atalar, C Kocabas, H Koymen 2012 IEEE International Ultrasonics Symposium, 987-990, 2012 | 8 | 2012 |
199-MHz Polysilicon Micromechanical Disk Array-Composite Oscillator Q Xie, S Afshar, A Ozgurluk, CTC Nguyen 2020 Joint Conference of the IEEE International Frequency Control Symposium …, 2020 | 7 | 2020 |
Q-boosting of Metal MEMS Resonators via Localized Anneal-Induced Tensile Stress A Ozgurluk, R Liu, CTC Nguyen European Frequency and Time Forum and IEEE International Frequency Control …, 2017 | 7 | 2017 |
Widely Tunable 20-nm-Gap Ruthenium Metal Square-Plate Resonator A Ozgurluk, K Peleaux, CTC Nguyen 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems …, 2019 | 6 | 2019 |
Lumped element modeling of CMUT arrays in collapsed mode E Aydogdu, A Ozgurluk, A Atalar, H Koymen 2014 IEEE International Ultrasonics Symposium, 309-312, 2014 | 5 | 2014 |
Lumped element model of single CMUT in collapsed mode E Aydogdu, A Ozgurluk, HK Oguz, A Atalar, H Koymen 2013 IEEE International Ultrasonics Symposium (IUS), 283-286, 2013 | 5 | 2013 |
High-Cx/Co Hollow Disk Resonators A Ozgurluk, Y Li, CTC Nguyen 2018 IEEE International Frequency Control Symposium (IFCS), 2018 | 3 | 2018 |
Precision resonant beam strain sensor employing gap-dependent frequency shift A Ozgurluk, CTC Nguyen 2020 Joint Conference of the IEEE International Frequency Control Symposium …, 2020 | 2 | 2020 |
On-Chip Precision Residual Strain Diagnostic Based on Gap-Dependent Electrical Stiffness A Ozgurluk, CTC Nguyen 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 2 | 2019 |
High-Q Strong Coupling Capacitive-Gap Transduced RF Micromechanical Resonators A Ozgurluk University of California, Berkeley, 2019 | 2 | 2019 |
Temperature-Insensitive Resonant Strain Sensor X Liu, Q Xie, A Ozgurluk, CTC Nguyen 2022 Joint Conference of the European Frequency and Time Forum and IEEE …, 2022 | 1 | 2022 |
Performance Enhancement and Restoration of Micromechanical Resonators Via UV-Ozone Treatment Q Xie, SA Afshar, A Ozgurluk, CTC Nguyen 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 1 | 2021 |
Temperature Compensation Using an In-Situ Gap-Based Temperature Sensor X Liu, Q Xie, A Ozgurluk, Q Jin, CTC Nguyen 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems …, 2024 | | 2024 |