| A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer A Aydemir, Y Terzioglu, T Akin Sensors and Actuators A: Physical 244, 324-333, 2016 | 91 | 2016 |
| Stepped-etching for preserving critical dimensions in through-wafer deep reactive ion etching of thick silicon SE Alper, A Aydemir, T Akin TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 19 | 2009 |
| Light trapping by micro and nano-hole texturing of single-crystalline silicon solar cells SH Altinoluk, HE Ciftpinar, O Demircioglu, F Es, G Baytemir, O Akar, ... Energy procedia 92, 291-296, 2016 | 17 | 2016 |
| Fabrication of a Three-Axis Capacitive MEMS Accelerometer on a Single Substrate A Aydemir, T Akin IEEE Sensors, 2015 | 13 | 2015 |
| Prevention of sidewall redeposition of etched byproducts in the dry Au etch process A Aydemir, T Akin Journal of Micromechanics and Microengineering 22 (7), 074004, 2012 | 13 | 2012 |
| Prevention of sidewall redeposition of etched byproducts in the dry Au etch process A Aydemir, T Akin The 22nd Micromechanics and Micro Systems Europe Workshop, (MME’11), 2011 | 13 | 2011 |
| Process Development for the Fabrication of a Three Axes Capacitive MEMS Accelerometer A Aydemir, T Akin Procedia Engineering 120, 727-730, 2015 | 7 | 2015 |
| Deep-trench RIE Optimization for High Performance MEMS Microsensors A Aydemir Natural and Applied Sciences, METU, 2007 | 7 | 2007 |
| Self-Packaged Three Axis Capacitive MEMS Accelerometer A Aydemir, T Akin The 33rd International Conference on Micro Electro Mechanical Systems, 2020 | 5 | 2020 |
| DRIE Process Optimization to Achieve High Aspect Ratio for Capacitive MEMS Sensors A Aydemir, T Akin 26th Micromechanics and Microsystems Europe Workshop, 2015 | 5 | 2015 |
| A Three Axis Capacitive MEMS Accelerometer on a Single Substrate A Aydemir Natural and Applied Sciences, METU, 2013 | 5* | 2013 |
| A three axis capacitive mems accelerometer on a single substrate A Aydemir, T Akin EP Patent EP3241027A1, 2017 | | 2017 |
| A three axis capacitive mems accelerometer on a single substrate A Aydemir, T Akin WO Patent WO2016108770A1, 2016 | | 2016 |
| Micro and Nano Hole Texturing Single Crystalline Silicon Wafer for Solar Cell Applications Effects of Hole Diameter and Distribution HS Altınoluk, EH Çiftpınar, O Demircioğlu, G Baytemir, F Es, O Akar, ... null, 2016 | | 2016 |
| An Ultimate Capacitive MEMS Vertical Accelerometer with Differential Sensing Capability A Aydemir, T Akın | | 2015 |
| An Ultimate Capacitive MEMS Accelerometer with Differential Sensing A Aydemir, T Akin 26th Micromechanics and Microsystems Europe workshop, 2015 | | 2015 |
| VEILS-FREE DRY (ICP) ETCHING OF GOLD FILMS WITH A VERTICAL SHARP SIDEWALL S Keskin, A Aydemir, T Akin | | 2013 |
Tayfun AKINMiddle East Technical UniversityVerified email at metu.edu.tr
Tayfun AKINMiddle East Technical UniversityVerified email at metu.edu.tr