A resonant microaccelerometer with high sensitivity operating in an oscillating circuit C Comi, A Corigliano, G Langfelder, A Longoni, A Tocchio, B Simoni Journal of microelectromechanical systems 19 (5), 1140-1152, 2010 | 182 | 2010 |
Z-axis magnetometers for MEMS inertial measurement units using an industrial process G Langfelder, C Buffa, A Frangi, A Tocchio, E Lasalandra, A Longoni IEEE Transactions on Industrial Electronics 60 (9), 3983-3990, 2012 | 86 | 2012 |
High scale-factor stability frequency-modulated MEMS gyroscope: 3-axis sensor and integrated electronics design P Minotti, S Dellea, G Mussi, A Bonfanti, S Facchinetti, A Tocchio, V Zega, ... IEEE Transactions on Industrial Electronics 65 (6), 5040-5050, 2017 | 61 | 2017 |
Design criteria of low-power oscillators for consumer-grade MEMS resonant sensors G Langfelder, A Caspani, A Tocchio IEEE Transactions on Industrial Electronics 61 (1), 567-574, 2013 | 56 | 2013 |
Operation of Lorentz-force MEMS magnetometers with a frequency offset between driving current and mechanical resonance G Langfelder, A Tocchio IEEE transactions on magnetics 50 (1), 1-6, 2013 | 54 | 2013 |
Mechanical and electronic amplitude-limiting techniques in a MEMS resonant accelerometer A Tocchio, A Caspani, G Langfelder IEEE Sensors Journal 12 (6), 1719-1725, 2011 | 53 | 2011 |
Compact biaxial micromachined resonant accelerometer A Caspani, C Comi, A Corigliano, G Langfelder, A Tocchio Journal of Micromechanics and Microengineering 23 (10), 105012, 2013 | 46 | 2013 |
A high sensitivity uniaxial resonant accelerometer C Comi, A Corigliano, G Langfelder, A Longoni, A Tocchio, B Simoni 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems …, 2010 | 46 | 2010 |
MEMS motion sensors based on the variations of the fringe capacitances G Langfelder, AF Longoni, A Tocchio, E Lasalandra IEEE Sensors Journal 11 (4), 1069-1077, 2010 | 39 | 2010 |
Solving FSR versus offset-drift trade-offs with three-axis time-switched FM MEMS accelerometer CR Marra, A Tocchio, F Rizzini, G Langfelder Journal of Microelectromechanical Systems 27 (5), 790-799, 2018 | 34 | 2018 |
Torsional MEMS magnetometer operated off-resonance for in-plane magnetic field detection G Laghi, S Dellea, A Longoni, P Minotti, A Tocchio, S Zerbini, ... Sensors and Actuators A: Physical 229, 218-226, 2015 | 33 | 2015 |
A versatile instrument for the characterization of capacitive micro-and nanoelectromechanical systems C Buffa, A Tocchio, G Langfelder IEEE Transactions on Instrumentation and Measurement 61 (7), 2012 | 32 | 2012 |
Readout of MEMS capacitive sensors beyond the condition of pull-in instability G Langfelder, T Frizzi, A Longoni, A Tocchio, D Manelli, E Lasalandra Sensors and Actuators A: Physical 167 (2), 374-384, 2011 | 31 | 2011 |
A new biaxial silicon resonant micro accelerometer C Comi, A Corigliano, G Langfelder, A Longoni, A Tocchio, B Simoni 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011 | 31 | 2011 |
Off-resonance low-pressure operation of Lorentz force MEMS magnetometers G Langfelder, G Laghi, P Minotti, A Tocchio, A Longoni IEEE Transactions on industrial electronics 61 (12), 7124-7130, 2014 | 29 | 2014 |
A 3-D micromechanical multi-loop magnetometer driven off-resonance by an on-chip resonator G Laghi, CR Marra, P Minotti, A Tocchio, G Langfelder Journal of Microelectromechanical Systems 25 (4), 637-651, 2016 | 23 | 2016 |
Enhancing the linear range of MEMS resonators for sensing applications A Tocchio, C Comi, G Langfelder, A Corigliano, A Longoni IEEE Sensors Journal 11 (12), 3202-3210, 2011 | 23 | 2011 |
High-sensitivity, z-axis micro-electro-mechanical detection structure, in particular for an MEMS accelerometer L Baldasarre, A Tocchio, S Zerbini US Patent 9,513,310, 2016 | 21 | 2016 |
Differential fringe-field MEMS accelerometer G Langfelder, A Tocchio IEEE transactions on electron devices 59 (2), 485-490, 2011 | 21 | 2011 |
A 160 ľA, 8 mdps/√Hz frequency-modulated MEMS yaw gyroscope P Minotti, G Mussi, S Dellea, A Bonfanti, AL Lacaita, G Langfelder, V Zega, ... 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2017 | 19 | 2017 |