N. Pelin Ayerden
N. Pelin Ayerden
Design Engineer, ASML
Verified email at asml.com
Title
Cited by
Cited by
Year
Compact gas cell integrated with a linear variable optical filter
NP Ayerden, G de Graaf, RF Wolffenbuttel
Optics Express 24 (3), 2981-3002, 2016
292016
Design, fabrication and characterization of infrared LVOFs for measuring gas composition
M Ghaderi, NP Ayerden, A Emadi, P Enoksson, JH Correia, G De Graaf, ...
Journal of Micromechanics and Microengineering 24 (8), 084001, 2014
282014
High-speed broadband FTIR system using MEMS
NP Ayerden, U Aygun, STS Holmstrom, S Olcer, B Can, JL Stehle, H Urey
Applied optics 53 (31), 7267-7272, 2014
222014
The miniaturization of an optical absorption spectrometer for smart sensing of natural gas
NP Ayerden, RF Wolffenbuttel
IEEE Transactions on Industrial Electronics 64 (12), 9666-9674, 2017
152017
Lamellar-Grating-Based MEMS Fourier Transform Spectrometer
HR Seren, S Holmstrom, NP Ayerden, J Sharma, H Urey
Microelectromechanical Systems, Journal of, 1-9, 2012
142012
A miniaturized optical gas-composition sensor with integrated sample chamber
NP Ayerden, M Ghaderi, P Enoksson, G de Graaf, RF Wolffenbuttel
Sensors and Actuators B: Chemical 236, 917-925, 2016
132016
Minimizing stress in large-area surface micromachined perforated membranes with slits
M Ghaderi, NP Ayerden, G De Graaf, RF Wolffenbuttel
Journal of Micromechanics and Microengineering 25 (7), 074010, 2015
102015
Design, fabrication and characterization of LVOF-based IR microspectrometers
NP Ayerden, M Ghaderi, MF Silva, A Emadi, P Enoksson, JH Correia, ...
Micro-Optics 2014 9130, 91300T, 2014
72014
A Lossy Fabry-Perot based optical filter for natural gas analysis
NP Ayerden, M Ghaderi, G De Graaf, RF Wolffenbuttel
Procedia Engineering 87, 1410-1413, 2014
62014
Optical design and characterization of a gas filled MEMS Fabry-Perot filter
NP Ayerden, M Ghaderi, G de Graaf, RF Wolffenbuttel
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems 9517, 95171N, 2015
42015
How accurate is the Fabry-Perot approximation in high-finesse linear variable optical filters for gas absorption spectroscopy?
NP Ayerden, RF Wolffenbuttel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th…, 2017
32017
Fabrication Tolerance Sensitivity in Large-Area Mid-Infrared Metamaterial Absorbers
M Ghaderi, E Karimi, NP Ayerden, RF Wolffenbuttel
Multidisciplinary Digital Publishing Institute Proceedings 1 (4), 328, 2017
32017
A highly miniaturized NDIR methane sensor
NP Ayerden, G de Graaf, P Enoksson, RF Wolffenbuttel
Micro-Optics 2016 9888, 98880D, 2016
32016
CMOS-compatible metamaterial-based wideband mid-infrared absorber for microspectrometer applications
EK Shahmarvandi, M Ghaderi, NP Ayerden, G de Graaf, RF Wolffenbuttel
Metamaterials X 9883, 988309, 2016
32016
Implementation of CMOS-compatible metamaterial absorber for gas sensing application
EK Shahmarvandi, M Ghaderi, P Ayerden, G de Graaf, RF Wolffenbuttel
Procedia engineering 168, 1241-1244, 2016
32016
Optical filter for providing the required illumination to enable narrow band imaging
MF Silva, JA Rodrigues, MJ Oliveira, AR Fernandes, S Pereira, CG Costa, ...
Procedia Engineering 87, 1414-1417, 2014
32014
Functionalizing a tapered microcavity as a gas cell for on-chip mid-infrared absorption spectroscopy
NP Ayerden, J Mandon, FJM Harren, RF Wolffenbuttel
Sensors 17 (9), 2041, 2017
22017
A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy
NP Ayerden, J Mandon, M Ghaderi, FJM Harren, RF Wolffenbuttel
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems…, 2017
22017
Design and fabrication of 45 inclined mirrors for wafer-level optical absorption spectroscopy
NP Ayerden, M Ghaderi, RF Wolffenbuttel
Journal of Physics: Conference Series 757 (1), 012018, 2016
22016
MEMS FTIR spectrometer and optical results
NP Ayerden, JL Stehle, S Holmstrom, H Urey
2012 International Conference on Optical MEMS and Nanophotonics, 130-131, 2012
22012
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Articles 1–20