Boron trichloride plasma treatment effect on ohmic contact resistance formed on GaN-based epitaxial structure AA Kobelev, YV Barsukov, NA Andrianov, AS Smirnov
Journal of Physics: Conference Series 586 (1), 012013, 2015
15 2015 Enhanced silicon nitride etching in the presence of F atoms: Quantum chemistry simulation YV Barsukov, V Volynets, AA Kobelev, NA Andrianov, AV Tulub, ...
Journal of Vacuum Science & Technology A 36 (6), 2018
13 2018 Influence of surface processing in a BCl3 plasma on the formation of ohmic contacts to AlGaN/GaN structures NA Andrianov, AA Kobelev, AS Smirnov, YV Barsukov, YM Zhukov
Technical Physics 62, 436-440, 2017
7 2017 Boron trichloride dry etching A Kobelev, N Andrianov, A Smirnov, Y Barsukov
Encyclopedia of Plasma Technology-Two Volume Set, 193-202, 2016
7 2016 Влияние обработки поверхности в BCl НА Андрианов, АА Кобелев, АС Смирнов, ЮВ Барсуков, ЮМ Жуков
Журнал технической физики 87 (3), 413-418, 2017
4 2017 Utilizing Lateral Plate Transducer Modes for High Quality Acoustofluidics in Silicon-Based Chips A Fuchsluger, A De Pastina, N Cselyuszka, N Andrianov, A Roshanghias, ...
2022 IEEE Sensors, 1-4, 2022
3 2022 Soft mask-based dry etching of parylene AF4 for advanced packaging applications MLF Bellaredj, N Andrianov, R Kaufhold, G Miskovic
2022 IEEE 24th Electronics Packaging Technology Conference (EPTC), 109-113, 2022
2 2022 Engineering mode coupling in a hybrid plasmon-photonic cavity for dual-band infrared spectroscopic gas sensing TD Dao, F Dubois, J Spettel, A Tortschanoff, C Fleury, N Cselyuszka, ...
OSA Continuum 4 (6), 1827-1837, 2021
2 2021 Многосеточные энергоанализаторы задерживающего потенциала для измерения функции распределения ионов по энергиям из плазмы высокочастотного емкостного разряда A Nikolai
Uspekhi Prikladnoi Fiziki 5 (6), 608-617, 2017
2 2017 Ultra-Fast Acoustofluidic Particle Focusing Using Lateral Modes of a Plate Transducer A Fuchsluger, A De Pastina, T Mitteramskogler, R Ecker, ...
2023 22nd International Conference on Solid-State Sensors, Actuators and …, 2023
1 2023 Highly Selective Plasma Etching Technique for Molybdenum AA Osipov, NA Andrianov, AB Speshilova, AE Gagaeva, S Risquez, ...
Plasma Chemistry and Plasma Processing 43 (3), 697-707, 2023
1 2023 Dual-frequency piezoelectric MEMS microphones based on AlSc30% N thin films for aeroacoustic measurements L Wu, Y Zhai, O Lokesh, C Bourquard, J Abbaszadeh, N Andrianov, ...
AIAA AVIATION 2023 Forum, 4391, 2023
1 2023 Chemically enhanced dry etching of Al0. 7Sc0. 3N for MEMS applications N Andrianov, A De Pastina, S Risquez, M Moridi
(Accepted/In press) 48th international conference on Micro and Nano …, 2022
1 2022 A Novel Approach to Characterize the Sodium Contamination Caused by Gas Filling During Anodic Bonding Y Zhang, F Solozzi, N Cselyuszka, K Sorchag, N Andrianov, M Bäuscher, ...
2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS …, 2022
1 2022 Novel Piezoelectric MOEMS Platform A Lagosh, Y Zhai, S Risquez, A De Pastina, N Andrianov, L Vojkuvka, ...
Micro and Nano Engineering (MNE) and EUROSENSORS 2022: MNE EUROSENSORS 2022, 2022
1 2022 Concept and Proof of Principle of an Acoustofluidic Single-Particle Sorting Device Using a Spatially Confined Acoustic Active Region A Fuchsluger, A De Pastina, T Mitteramskogler, R Ecker, ...
Proceedings 97 (1), 41, 2024
2024 Acoustofluidic Trapping in Structured Microchannels Using Lateral Transducer Modes A Fuchsluger, A De Pastina, T Mitteramskogler, R Ecker, ...
2023 IEEE SENSORS, 1-4, 2023
2023 Efficient Xe Filling of MEMS Vapor Cells Empowered by Customized Triple Stack Wafer Bond Processing A Roshanghias, J Kaczynski, A Rodrigues, M Hübner, M Zauner, ...
ECS Transactions 112 (3), 221, 2023
2023 Engineering Light with Mid-Infrared Metasurfaces for Sensing and Imaging Applications TD Dao, N Andrianov, M Chouiki, AS Munir, J Spettel, F Dubois, C Fleury, ...
Optical Sensors, STu5C. 4, 2023
2023 Engineering Light with Mid-Infrared Metasurfaces for Sensing and Imaging Applications: Engineering Light with Mid-Infrared Metasurfaces for Sensing and Imaging Applications TD Dao, N Andrianov, M Chouiki, SM Azeem, J Spettel, F Dubois, ...
Optica Sensing Congress 2023, 2023
2023 
Anton KobelevPeter the Great St. Petersburg Polytechnic University (SPbPU)spbstu.ru üzerinde doğrulanmış e-posta adresine sahip
