| Growth and phase stabilization of HfO2 thin films by ALD using novel precursors J Niinistö, M Mäntymäki, K Kukli, L Costelle, E Puukilainen, M Ritala, ... Journal of Crystal Growth 312 (2), 245-249, 2010 | 79 | 2010 |
| Atomic Layer Deposition of LiF Thin Films from Lithd and TiF4 Precursors M Mäntymäki, J Hämäläinen, E Puukilainen, F Munnik, M Ritala, ... Chemical Vapor Deposition 19 (4‐6), 111-116, 2013 | 48 | 2013 |
| Atomic Layer Deposition of LiF Thin Films from Lithd, Mg(thd)2, and TiF4 Precursors M Mäntymäki, J Hämäläinen, E Puukilainen, T Sajavaara, ... Chemistry of Materials 25 (9), 1656-1663, 2013 | 47 | 2013 |
| Atomic Layer Deposition of AlF3 Thin Films Using Halide Precursors M Mantymaki, MJ Heikkila, E Puukilainen, K Mizohata, B Marchand, ... Chemistry of Materials 27 (2), 604-611, 2015 | 43 | 2015 |
| Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check WA Lanford, M Parenti, BJ Nordell, MM Paquette, AN Caruso, ... Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2016 | 42 | 2016 |
| Metal fluorides as lithium-ion battery materials: an atomic layer deposition perspective M Mäntymäki, M Ritala, M Leskelä Coatings 8 (8), 277, 2018 | 40 | 2018 |
| Double metal alkoxides of lithium: Synthesis, structure and applications in materials chemistry M Mäntymäki, M Ritala, M Leskelä Coordination Chemistry Reviews 256 (9-10), 854-877, 2012 | 35 | 2012 |
| Understanding the stabilizing effects of nanoscale metal oxide and Li–metal oxide coatings on lithium-ion battery positive electrode materials Z Ahaliabadeh, V Miikkulainen, M Mantymaki, S Mousavihashemi, ... ACS Applied Materials & Interfaces 13 (36), 42773-42790, 2021 | 21 | 2021 |
| Preparation of lithium containing oxides by the solid state reaction of atomic layer deposited thin films E Atosuo, M Mäntymäki, K Mizohata, MJ Heikkila, J Raisanen, M Ritala, ... Chemistry of Materials 29 (3), 998-1005, 2017 | 19 | 2017 |
| Studies on Li3AlF6 thin film deposition utilizing conversion reactions of thin films M Mäntymäki, K Mizohata, MJ Heikkilä, J Räisänen, M Ritala, M Leskelä Thin Solid Films 636, 26-33, 2017 | 12 | 2017 |
| Vapor deposition of LiF thin films M Mäntymäki, J Hämäläinen, M Ritala, M Leskelä US Patent 9,382,615, 2016 | 7 | 2016 |
| Atomic layer deposition of GdF3 thin films E Atosuo, K Mizohata, M Mattinen, M Mäntymäki, M Vehkamäki, ... Journal of Vacuum Science & Technology A 40 (2), 2022 | 6 | 2022 |
| Atomic Layer Deposition and Lithium-ion Batteries: Studies on new materials and reactions for battery development M Mäntymäki Academic Dissertation, University of Helsinki, 2017 | 6 | 2017 |
| Atomic layer deposition of aluminum fluoride thin films M Mäntymäki, M Ritala, M Leskelä US Patent 9,394,609, 2016 | 6 | 2016 |
| Studies on solid state reactions of atomic layer deposited thin films of lithium carbonate with hafnia and zirconia M Mäntymäki, E Atosuo, MJ Heikkilä, M Vehkamäki, M Mattinen, ... Journal of Vacuum Science & Technology A 37 (2), 2019 | 5 | 2019 |
| Electrochemical reduction of carbon dioxide to formate in a flow cell on CuSx grown by atomic layer deposition M Suominen, M Mäntymäki, M Mattinen, J Sainio, M Putkonen, T Kallio Materials today sustainability 24, 100575, 2023 | 3 | 2023 |
| Atomic layer deposition of zinc oxide on mesoporous zirconia using zinc (II) acetylacetonate and air J Yim, E Haimi, M Mäntymäki, V Kärkäs, R Bes, AA Gutierrez, ... Chemistry of Materials 35 (19), 7915-7930, 2023 | 2 | 2023 |
| Atomic layer deposition of CoF 2, NiF 2 and HoF 3 thin films E Atosuo, M Mäntymäki, L Pesonen, K Mizohata, T Hatanpää, M Leskelä, ... Dalton Transactions 52 (31), 10844-10854, 2023 | 2 | 2023 |
| Atomic Layer Deposition of GdF 3 Thin Films E Atosuo, K Mizohata, M Mattinen, M Mäntymäki, M Vehkamäki, ... ECS Meet. Abstr, 2021 | 1 | 2021 |
| Litiumin kaksoismetallialkoksidien valmistus ja käyttö ohutkalvojen lähdeaineena. M Mäntymäki | 1 | 2010 |
