Chienliu Chang

Cited by

	All	Since 2019
Citations	12632	3061
h-index	21	13
i10-index	37	23

1800

900

450

1350

200620072008200920102011201220132014201520162017201820192020202120222023202442 38 26 51 68 164 287 880 1456 1671 1775 1664 1352 919 638 497 404 433 169

Public access

View all

7 articles

2 articles

available

not available

Based on funding mandates

Co-authors

Jung Woo ChoeVave HealthVerified email at vavehealth.com
Morten Fischer RasmussenResearch Scientist, Stanford UniversityVerified email at stanford.edu
Ji Hoon JangStanford UniversityVerified email at stanford.edu
Anshuman BhuyanStanford University, Meta Reality Labs, Ex-AppleVerified email at alumni.stanford.edu
Ömer OralkanNorth Carolina State UniversityVerified email at ncsu.edu
Amin ArbabianStanford UniversityVerified email at stanford.edu
Kuang-Chao FanNational Taiwan UniversityVerified email at ntu.edu.tw
Kim Butts PaulyProfessor of Radiology, Bioengineering and Electrical Engineering, by courtesy, Stanford UniversityVerified email at stanford.edu
Ronald WatkinsStanford University Department of RadiologyVerified email at stanford.edu
Kuang-Chong WuNational Taiwan UniversityVerified email at iam.ntu.edu.tw
Chih-Kung LeeNational Taiwan UniversityVerified email at ntu.edu.tw
Byung Chul LeeKorea Institute of Science and Technology (KIST)Verified email at kist.re.kr
Kamyar FirouziStanford UniversityVerified email at STANFORD.EDU
Takahito OnoTohoku UniversityVerified email at tohoku.ac.jp
Srikant VaithilingamRobotics Systems Engineering - Performance, Quality & Security at IntrinsicVerified email at alumni.stanford.edu
Kwan Kyu ParkHanyang UniversityVerified email at hanyang.ac.kr
Wu Chyan-ChyiMechanical and Electromechanical Engineering, Tamkang UniversityVerified email at mail.tku.edu.tw
Shuji TanakaTohoku UniversityVerified email at mems.mech.tohoku.ac.jp
Huseyin Kagan OguzStanford UniversityVerified email at stanford.edu
Mark Ming-Cheng ChengElectrical and Computer Engineering, the University of AlabamaVerified email at eng.ua.edu

Chienliu Chang

InvenSense

Verified email at invensense.com

MEMS


Title Sort by citations Sort by year Sort by title	Cited by Cited by	Year
Method of dry etching oxide semiconductor film C Chang US Patent 7,767,106, 2010	3680	2010
Semiconductor device C Chang US Patent App. 12/063,430, 2009	3676	2009
Dry etching method for oxide semiconductor film C Chang US Patent 8,034,248, 2011	3641	2011
Flexible temperature sensor array based on a graphite-polydimethylsiloxane composite WP Shih, LC Tsao, CW Lee, MY Cheng, C Chang, YJ Yang, KC Fan Sensors 10 (4), 3597-3610, 2010	246	2010
Etching submicrometer trenches by using the Bosch process and its application to the fabrication of antireflection structures C Chang, YF Wang, Y Kanamori, JJ Shih, Y Kawai, CK Lee, KC Wu, ... Journal of micromechanics and microengineering 15 (3), 580, 2005	194	2005
Oxide etching method C Chang US Patent 8,168,544, 2012	126	2012
Innovative micromachined microwave switch with very low insertion loss C Chang, P Chang Sensors and Actuators A: Physical 79 (1), 71-75, 2000	119	2000
A piezodriven XY-microstage for multiprobe nanorecording D Zhang, C Chang, T Ono, M Esashi Sensors and Actuators A: Physical 108 (1-3), 230-233, 2003	78	2003
Trench filling characteristics of low stress TEOS/ozone oxide deposited by PECVD and SACVD C Chang, T Abe, M Esashi Microsystem technologies 10 (2), 97-102, 2004	64	2004
Capacitive micro pressure sensor integrated with a ring oscillator circuit on chip CL Dai, PW Lu, C Chang, CY Liu Sensors 9 (12), 10158-10170, 2009	63	2009
Capsule ultrasound device F Memon, G Touma, J Wang, S Baltsavias, A Moini, C Chang, ... 2015 IEEE International Ultrasonics Symposium (IUS), 1-4, 2015	50*	2015
Wet etching rates of InGaZnO for the fabrication of transparent thin-film transistors on plastic substrates CY Lee, C Chang, WP Shih, CL Dai Thin Solid Films 518 (14), 3992-3998, 2010	47	2010
Acoustic lens for capacitive micromachined ultrasonic transducers C Chang, K Firouzi, KK Park, AF Sarioglu, A Nikoozadeh, HS Yoon, ... Journal of Micromechanics and Microengineering 24 (8), 085007, 2014	38	2014
Micro-structure fabrication method Y Zaitsu, C Chang, M Majima US Patent 8,082,651, 2011	37	2011
Electromechanical transducer and manufacturing method therefor C Chang US Patent 8,371,018, 2013	35	2013
Ex Vivo HIFU Experiments Using a -Element CMUT Array HS Yoon, C Chang, JH Jang, A Bhuyan, JW Choe, A Nikoozadeh, ... IEEE transactions on ultrasonics, ferroelectrics, and frequency control 63 …, 2016	33	2016
Method of manufacturing a capacitive electromechanical transducer C Chang US Patent 8,288,192, 2012	29	2012
Etching method, pattern forming process, thin-film transistor fabrication process, and etching solution C Chang US Patent 7,960,289, 2011	28	2011
Dual-mode integrated circuit for imaging and HIFU with 2-D CMUT arrays JH Jang, MF Rasmussen, A Bhuyan, HS Yoon, A Moini, C Chang, ... 2015 IEEE International Ultrasonics Symposium (IUS), 1-4, 2015	23	2015
An integrated Ring CMUT array for endoscopic ultrasound and photoacoustic imaging A Nikoozadeh, C Chang, JW Choe, A Bhuyan, BC Lee, A Moini, ... 2013 IEEE International Ultrasonics Symposium (IUS), 1178-1181, 2013	23	2013

The system can't perform the operation now. Try again later.

Articles 1–20

Citations per year

Duplicate citations

Merged citations

Add co-authorsCo-authors

Follow

Cited by

Co-authors